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For this test
noncluster tools
orgで入手可能となる。初版は1998年6月に発行，前版は2004年7月に発行された。
This Standard can be used as a specification when purchasing these solder spheres
M02300 - SEMI M23 - Specification for Polished Monocrystalline Indium Phosphide Wafers StdPbc-0819 For this testThis Specification covers the substrate requirements for monocrystalline high purity indium phosphide wafers used in semiconductor and electronic device manufacturing. Dimensional and crystallographic orientation characteristics are the only standardized properties set forth below. A complete purchase specification may require that additional physical, electrical, and bulk properties be defined. These properties are listed together with test methods
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